Abstract
In the present work, the design and the environmental conditions of a micromachined thermal accelerometer, based on convection effect, are discussed and studied in order to understand the behavior of the frequency response evolution of the sensor. It has been theoretically and experimentally studied with different detector widths, pressure and gas nature. Although this type of sensor has already been intensively examined, little information concerning the frequency response modeling is currently available and very few experimental results about the frequency response are reported in the literature. In some particular conditions, our measurements show a cut-off frequency at −3 dB greater than 200 Hz. By using simple cylindrical and planar models of the thermal accelerometer and an equivalent electrical circuit, a good agreement with the experimental results has been demonstrated.
Highlights
IntroductionMicromachines 2011, 2 inducing a low fabrication cost. These last years, many kinds of accelerometers have been developed for measuring vibration, shock, inertial motion and studied because they are widely used in the field of aviation, automation in machine condition monitoring and more especially in automotive industry, such as air bag crash detection
Thermal micromachined accelerometers have recently attracted attention and been intensively studied because of their high shock reliability due to the absence of seismic mass and their small sizeMicromachines 2011, 2 inducing a low fabrication cost
When the heating resistor is powered, it creates a symmetrical temperature profile inducing a thermal balance inside the cavity
Summary
Micromachines 2011, 2 inducing a low fabrication cost. These last years, many kinds of accelerometers have been developed for measuring vibration, shock, inertial motion and studied because they are widely used in the field of aviation, automation in machine condition monitoring and more especially in automotive industry, such as air bag crash detection. Based on free convection in a closed chamber containing a gas, the sensor is composed of one electrical heating resistor placed symmetrically between two temperature detectors. All studies previously done [5,6] on this kind of sensor have allowed understanding the evolution of sensitivity in relation to some parameters, such as the cavity volume, the detectors geometrical design or the gas nature, but very few of them have been done on the dynamic behavior. We give the influence of several parameters such as detector width, gas nature and pressure on the sensor response, as well as its evolution depending on temperature variation.
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