Effect of the Coil Angle in an Inductively Coupled Plasma Torch: A Novel Two-Dimensional Model

Abstract

A two-dimensional model has been developed for the calculation of the electromagnetic (EM) fields generated by spiral coil currents, in order to obtain a better representation of the actual configuration used in a typical inductively coupled plasma (ICP) torch. In order to obtain the EM fields in a two-dimensional model, the change of EM field in tangential direction is neglected and the coil is assumed to be a concentric cylinder. In order to justify our assumption, the EM, flow and temperature fields resulting from five-ring coil and concentric cylinder coil are compared and the results are almost the same except for the EM field in the vicinity of the coil. In the case of the spiral coil, the coil current is inclined with respect to the horizontal plane. Therefore current in the cylinder coil is assumed to have the same inclined angle, which is split into tangential and axial components. The axial electric field and hence an axial current in plasma is induced by the axial component of the spiral coil current. Charge density is accumulated in the plasma, since the axial current cannot form a loop. In order to obtain the EM field and the charge distribution in the plasma generated by the spiral coil, the equations of axial vector potential and electrostatic potential have been derived. Due to the swirling Lorentz force (Jz×Br) an axisymmetrical swirling fluid model is used to simulate the plasma flow in an axisymetrical configuration. With an inclined angle of the coil current being 3.7° and the frequency being 3 MHz, computational results show that the swirling Lorentz force causes plasma swirling with a maximum speed of 3.41 m/s near the plasma center when the injected sheath gas and central gas are not swirling. In these conditions, the real and imaginary parts of the maximum electrostatic potential are 0.95 V and 1.66 V, respectively. When the electrostatic field is neglected, the swirling velocity of the plasma is 3.95 m/s.