Abstract

Three different clusters, Si9H12, Si15H16, and Si21H20, are used in density-functional theory calculations in conjunction with ab initio pseudopotentials to study how the energetics of H2 dissociative adsorption on and associative desorption from Si(001) depends on the cluster size. The results are compared to five-layer slab calculations using the same pseudopotentials and high quality plane-wave basis set. Several exchange-correlation functionals are employed. Our analysis suggests that the smaller clusters generally overestimate the activation barriers and reaction energy. The Si21H20 cluster, however, is found to predict reaction energetics, with Eades=56±3kcal/mol (2.4±0.1eV), reasonably close (though still different) to that obtained from the slab calculations. Differences in the calculated activation energies are discussed in relation to the efficiency of clusters to describe the properties of the clean Si(001)-2×1 surface.

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