Abstract
The effect of target temperature on surface composition changes of Cu−Ni alloys during Ar ion bombardment was studied by means of quantitative Auger electron spectroscopy. After sputtering at various temperatures the surface composition changes were analyzed at room temperature. At room temperature, the surface was enriched with Ni. It was found that the sputtering yield ratio of Cu/Ni was 1.9 over a whole range of the composition and that the value was almost coincident with that estimated from pure metals. As the temperature increased, the inclination toward Ni enrichment was enhanced. Though the sputtering yields of pure metals were independent of the temperature, in the alloys the yield ratio increased to 3.5 at 250 °C. However, above 400 °C the yield ratios decreased. The surface composition was mainly determined by the fast diffusion of Cu on the sputter−damaged layers.
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