Abstract

We investigated the effects of surface modification treatment (SMT) on the perpendicular magnetic anisotropy (PMA) and the thermal tolerance of top-pinned magnetic tunnel junctions (MTJs) with a Co/Pt synthetic ferrimagnetic coupling reference layer. Applying an SMT to the bottom Pt layer increased the PMA of the overlying Co/Pt multilayer. X-ray diffraction spectrum analysis revealed that the SMT resulted in a higher crystallinity and smaller lattice spacing in the Co/Pt multilayer in the thinner bottom Pt layer, which may have increased the PMA in the Co/Pt multilayer. The tunnel magnetoresistance (TMR) ratio of the MTJ with SMT increased as the annealing temperature was increased up to 400 °C; conversely, the TMR ratio of the MTJ without SMT decreased at an annealing temperature of 400 °C. Evaluation of the m-H loops revealed that, after annealing at 400 °C, the reference layers in the MTJs after SMT possessed better magnetic properties than those in the MTJs without an SMT; this is attributable to the higher PMA of the reference layers with SMT. EDX line analysis revealed that SMT suppressed Pt diffusion to the MgO barrier, resulting in a higher thermal tolerance and larger PMA of the reference layer.

Highlights

  • An embedded nonvolatile memory is an essential element for future electronics as it can significantly reduce the standby power, which is an important requirement in memory applications

  • energy dispersive X-ray (EDX) line analysis revealed that surface modification treatment (SMT) suppressed Pt diffusion to the MgO barrier, resulting in a higher thermal tolerance and larger perpendicular magnetic anisotropy (PMA) of the reference layer

  • We investigated the effects of SMT on the thermal tolerance of top-pinned magnetic tunnel junctions (MTJs) with a perpendicular easy axis

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Summary

Introduction

An embedded nonvolatile memory is an essential element for future electronics as it can significantly reduce the standby power, which is an important requirement in memory applications. Spintronics-based memories are the most suitable for embedded nonvolatile memory applications owing to their lowvoltage and high-speed operation capabilities.. CoFeB/MgO interface magnetic tunnel junctions (MTJs) with perpendicular magnetic anisotropy (PMA) (i-pMTJs) have become the de facto standard for modern spin-transfer torque magnetic random access memory (STT-MRAM) technology because they satisfy the requirements of a low write current, high tunnel magnetoresistance (TMR) ratio, high thermal stability, and high scalability. STT-MRAM technology has a bottom-pinned structure, in which the pinned layer lies under the MgO tunneling barrier, is widely used. SOT-MRAM technology has an MTJ with a top-pinned structure, in which the pinned layer lies on the MgO tunneling barrier, has been employed because a free layer must be positioned adjacent to the channel layer

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