Abstract
Presented herein is a comprehensive analysis on the size-dependent dynamic behaviors of electrostatically actuated nano-resonator including surface stresses effect. To this end, partial differential equation of nano-resonator based on Gurtin–Murdoch and Euler–Bernoulli theories is converted to ordinary differential equation utilizing assumed mode method.Effect of applied DC voltage on stability and bi-stability of nano-resonator is investigated and it revealed that surface elasticity and stress affect the bi-stability region of nano-resonator. By plotting frequency response of the resonator, hardening and softening behavior of nano-resonator are analyzed and it is shown that surface effect may change the hardening and softening behavior of nano-resonators.
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