Abstract
Surface elasticity often plays a significant role in the physical properties of micro and nanosized materials and structures. In this paper the effect of surface elastic modulus on the bending of a microcantilever, which was excited with a frequency-modulated laser, is studied by incorporating the effect of the surface elastic modulus into the equation of motion. The deflection of microcantilever with surface elastic effect was obtained analytically and shown graphically. It was found that the surface elastic modulus had distinct effect on the deflection and resonance frequencies of microcantilever. The present study might be helpful for the design and application of microcantilever device.
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