Abstract
Polycrystalline zinc oxide (ZnO) thin films have been deposited at 450°C onto glass and silicon substrates by pulsed laser deposition technique (PLD). The used source was a KrF excimer laser (248 nm, 25 ns, 5 Hz, 2 J/cm2). The effects of glass and silicon substrates on structural and optical properties of ZnO films have been investigated. X-ray diffraction patterns showed that ZnO films are polycrystalline with a hexagonal wurtzite—type structure with a strong (103) orientation and have a good crystallinity on monocrystalline Si(100) substrate. The thickness and compositional depth profile were studied by Rutherford Backscattering spectrometry (RBS). The average transmittance of ZnO films deposited on glass substrate in the visible range is 70%.
Highlights
In recent years, there is a great interest in production of transparent conducting oxide (TCO) and transparent oxide semi-conductors for the development of photonic devices and transparent conducting electrodes (TCE) for solar cells [1]
The peaks in the spectra of zinc oxide (ZnO) thin films deposited on glass and Si-Poly substrates confirm the hexagonal wurtzite polycrystalline structure which is in good agreement with (JCPDS 36-1451) data with well-oriented (103) texture
The crystallinity of ZnO films determined from the full width at half maximum (FWHM) values of (103) diffraction peak confirms a c-axis preferential orientation
Summary
There is a great interest in production of transparent conducting oxide (TCO) and transparent oxide semi-conductors for the development of photonic devices and transparent conducting electrodes (TCE) for solar cells [1]. A number of studies on ZnO films deposited on various substrates including glass, Si, GaN, GaAs and diamond have been conducted [2,3,4,5]. Nucleation and binding of growth species may vary due to the movement of substrate. This affects crystalline quality as well as optical and electrical properties. Most attentions are paid to the influences of deposition conditions on the properties of ZnO films rather than the substrate selection. The effect of glass and silicon substrates on the structural and optical properties of ZnO thin films grown by pulsed laser deposition has been studied
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