Abstract
CuInSe2 (CIS) nanoparticle thin films have been prepared by radio frequencyreactive magnetron sputtering from compound ternary fan-shaped targetson low-temperature substrates with pure argon gas as the atmosphere.The stoichiometry of the ternary compound semiconductor quantum dotscan easily be controlled by the ratios of the ternary elements andsputtering parameters. CIS nanoparticle thin films regularly shaped anddistributed reasonably uniform in size on substrates of 7059 glassetc can be grown in this way. The average particle diameter can bevaried between 40-80 nm by an appropriate choice of the substratetemperature, power density and total CIS coverage. The optical andelectrical properties of the CIS films have also been studied.
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