Abstract
The first part of this paper focuses on the chemical and thermal properties of pdMMA films, which are evaluated as a function of Tsubstrate. Thermogravimetric analysis reveals a decreased low molecular weight fraction and enhanced cross-link density with increasing Tsubstrate. In accordance, an enhanced glass transition is observed with differential scanning calorimetry. In a second part, a new Arrhenius-type empirical model is presented for the specific plasma deposition rate k0, i.e., , with input plasma power and precursor feed rate (by means of the Yasuda factor, Yf) and T of the substrate as variables of the plasma deposition process. A simplified plasma deposition mechanism is suggested based on adsorption, desorption, and surface plasma polymerization of activated species, justifying the experimental findings and empirical model.
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