Abstract
The first part of this paper focuses on the chemical and thermal properties of pdMMA films, which are evaluated as a function of Tsubstrate. Thermogravimetric analysis reveals a decreased low molecular weight fraction and enhanced cross-link density with increasing Tsubstrate. In accordance, an enhanced glass transition is observed with differential scanning calorimetry. In a second part, a new Arrhenius-type empirical model is presented for the specific plasma deposition rate k0, i.e., , with input plasma power and precursor feed rate (by means of the Yasuda factor, Yf) and T of the substrate as variables of the plasma deposition process. A simplified plasma deposition mechanism is suggested based on adsorption, desorption, and surface plasma polymerization of activated species, justifying the experimental findings and empirical model.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.