Abstract
deposition method (SPD) for different substrate temperatures (200, 250, 300, and 350 °C). In this study, we investigated the effect of the variation in substrate temperature on the crystal structure and optical properties of CaZnO3 thin films using a scanning electron microscope (SEM), an X-ray spectrum, and a UV spectrum. The absorbance and transmittance of the prepared films with wave length show a clear variation with substrate temperature. The band gap varied from 2.65 eV to 2.8 eV. The SEM images show that the grain size increases with substrate temperature, and this agrees with the grain size calculated from the X-ray spectrum. The grain size was within the range of 16.39–184.34 nm.
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