Abstract
Indium and gallium co-doped zinc oxide (IGZO) thin films were deposited on glass substrates by ultrasonic spray pyrolysis. Physical properties such as structural, morphological, optical and electrical properties were examined on IGZO thin films with respect to the changes in the substrate temperature (425, 450 and 475°C). Structural results showed that IGZO films were crystalline and presented hexagonal wurtzite structure. Morphological studies proved that the substrate temperature changed the sizes of hexagonal nanostructures of IGZO. Optical transmittance in the UV–vis region and electrical measurements confirmed that IGZO films were transparent (>70%) with a minimum electrical resistivity ~10.5×10−3Ωcm.
Sign-in/Register to access full text options 
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
