Abstract
In this work, the influence of the substrate temperature on properties of cobalt oxide thin films has been reported. Cobalt oxide thin films were prepared by electrostatic spray deposition technique on glass substrate at different temperature of the substrate. The properties of cobalt oxide films were characterized by X-Ray diffraction (XRD), scanning electron microscope, Raman spectroscopy, UV-visible spectrophotometer, respectively. In additional, the crystalline structural parameters can be performed from XRD data. Phase transformation of cobalt oxide films due to different substrate temperature was observed. Moreover, the optical properties of films were depended on the quantity of phase transition in cobalt oxide film.
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