Abstract
Diamondlike carbon (DLC) films were grown on Si and ceramic substrates by very-high-frequency chemical vapor deposition at temperature of approximately 250 °C. Thin metal coatings from Ti, Ni, Pt, and Cu were deposited on the substrates before DLC film deposition. The impact of the pregrowth treatments of the substrates on surface morphology and emission properties of the grown DLC films was studied. The films deposited on ceramic substrates pretreated by Ti, Ni, and Pt coatings, with grainlike structures, demonstrated good emission currents and low threshold voltages among the deposited DLC films.
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