Abstract
Hard nitride coatings (TiN, ZrN) were deposited onto tool steel, iron and hard metal substrate using reactive d.c. magnetron sputtering in an N 2—Ar atmosphere. The effect of residual atmosphere impuruties was simulated by additional oxygen at partial pressures of 1 × 10 -5, 5 × 10 -5 and 1 × 10 -4 mbar. The composition of the nitride coating-substrate interface was characterized by scanning Auger electron spectroscopy using sputter depth and crater edge profiling. A number of commercially deposited nitride coatings were also studied. In all cases oxygen impurities in the sputter atmosphere result in an oxygen-enriched zone in the interface region of the coatings. The relative amount of oxygen enrichment at the interface becomes generally less pronounced with increasing O 2 partial pressures and is mainly confined to the coating layer on top of the substrate. Higher oxygen pressures also cause noticeable changes in coating properties.
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