Abstract
Four types of MEMS actuators are presented in this paper. The effect of structure on three major performance parameters of these actuators, such as resonance frequency, pull in voltage and stroke, are studied by FEA and compared with each other. The result shows that, on the condition of the same spring length and the same spring width , O-shape actuator have the largest stroke and pull in voltage, but that of L-shape actuator is the smallest.
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