Abstract
Fluorinated diamond-like carbon (F-DLC) films were prepared by radio frequency plasma-enhanced chemical vapor deposition technique with CF4and CH4as source gases under different deposition conditions. The chemical bonding structure and composition of the films were detected by Raman, Fourier transform infrared absorption spectrometry (FTIR), and X-ray photoelectron spectroscopy (XPS) characterization. The micromorphology and surface roughness of the film were observed and analyzed by atomic force microscopy (AFM). The results indicated that all the prepared films presented a diamond-like carbon structure. The relative content of fluorine in the films increased, containing more CF2groups. The ratio of hybrid structure sp3/sp2decreased. The surface roughness of the films increased when the gas flow ratioR(R = CF4/[CH4 + CF4]) or the deposition power increased. The contact angle of water with the surface of the F-DLC film was measured with a static drop-contact angle/surface tension measuring instrument. The hydrophobic property of the F-DLC films was found to be dependent on the sp2structure, fluorine content, and surface roughness of the films. The contact angle increased when the relative content of fluorine in the films and sp2content increased, whereas the contact angle first increased and then decreased with the surface roughness.
Highlights
In recent years, fluorinated amorphous carbon film (a-C:F) has attracted the attention of researchers for its application as a film with a low dielectric constant [1,2,3], a self-lubricating and low friction resistance film [4, 5], an antireflection film with low refractive index and small dispersion, or a protective film against strong ultraviolet absorption [6, 7]
Existing studies rarely dealt with other characteristics of Fluorinated diamond-like carbon (DLC) (F-DLC) films, which are expected to be applicable in the field of medicine [14,15,16,17]
This paper investigated the relationship among the chemical bonding structure, composition, surface morphology, and hydrophobic properties of F-DLC films prepared under different gas flow ratios R (R = CF4/[CH4 + CF4])
Summary
In recent years, fluorinated amorphous carbon film (a-C:F) has attracted the attention of researchers for its application as a film with a low dielectric constant [1,2,3], a self-lubricating and low friction resistance film [4, 5], an antireflection film with low refractive index and small dispersion, or a protective film against strong ultraviolet absorption [6, 7]. Carbon atoms form chemical bonds via three different hybridizations, namely, sp, sp2, and sp, in amorphous carbon, including diamond-like carbon (DLC) film, graphite-like carbon (GLC) film, and polymer-like carbon (PLC) film. The sp content in the F-DLC film is very low. Existing studies rarely dealt with other characteristics of F-DLC films (e.g., hydrophobicity, biological compatibility), which are expected to be applicable in the field of medicine [14,15,16,17]. An F-DLC film and polytetrafluoroethylene (PTFE) are very much alike in terms of their hydrophobic property, as both have a C-F2 group. This paper investigated the relationship among the chemical bonding structure, composition, surface morphology, and hydrophobic properties of F-DLC films prepared under different gas flow ratios R (R = CF4/[CH4 + CF4]). The findings of this research are of significant reference value for F-DLC films applied in clinical medicine
Sign-in/Register to view highlights & summary Sign-in/Register to access full text options 
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
