Abstract

Barium stannate (BaSnO3, BS) and silver composite thin films are deposited on flexible polyethylene terephthalate (PET) substrates by magnetron sputtering. The effects of structural design on electrical and optical properties of the BS/Ag/BS tri-layer flexible thin films are investigated systematically. The BS layers can enhance the transmittance significantly, due to the fact that reflection of light from the Ag layer and PET substrate can be suppressed by BS layers. The tri-layer thin films show the high figure of merit of 16.66 × 10−3 Ω−1 and the large commutation quality factor of 197, while the average optical transmittance in the visible light range is above 84% and the sheet resistance is 10.52 Ω/sq. In addition, the flexible tri-layer thin films show outstanding mechanical flexibility, adhesion to PET substrate and stability at high temperature.

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