Effect of steady crucible rotation on the segregation of impurities in vertical Bridgman growth of multi-crystalline silicon

Abstract

We have performed axisymmetric, transient simulations of the vertical Bridgman growth of multi-crystalline (mc) silicon to study the effect of the steady crucible rotation on the melt flow and impurity segregation. A solute transport model has been applied to predict the final segregation pattern of impurities in a circular ingot. Imposing rotation rates of 1–5 rpm on the system makes radial segregation much worse compared to the non-rotating case. Low rotation rates at 1–2 rpm increase radial segregation in the first half period of solidification, whereas at rotation rates above the effect is insignificantly small. Contrary behavior was observed for the second half period of solidification. Here radial segregation is increased at high rotation rates from 3 to 5 rpm with small impact at 1–2 rpm.