Effect of sputtering anisotropic ejection on the optical properties and residual stress of Nb2O5 thin films

Abstract

The effect of sputtering anisotropic ejection on the optical properties and internal stress of niobium pentoxide (Nb2O5) films prepared by ion-beam sputtering deposition (IBSD) was investigated experimentally. Thin films were deposited on unheated BK7 glass substrates and silicon wafers at different ejection angles surrounding a metal target. The ejection angles varied from 0° to 75° in increments of 15° for each substrate. It was found that the optical constants of the Nb2O5 films were significantly influenced by the sputtering ejection angle. The surface roughness and residual stress in the Nb2O5 thin films were also found to vary with the ejection angle. In this work, Nb2O5 films had a higher refractive index, lower absorption, lower stress and lower roughness when films deposited at an ejection angle of 30°.