Effect of spatial relationship between arc plasma and substrate on the properties of transparent conducting Ga-doped ZnO thin films prepared by vacuum arc plasma evaporation

Abstract

The effect of the spatial relationship between the arc plasma flow and the substrate surface on the resulting film thickness and electrical properties is investigated in transparent conducting Ga-doped ZnO (GZO) thin films deposited by a vacuum arc plasma evaporation (VAPE) method. It was found that the resulting electrical properties of GZO thin films produced by a VAPE deposition on a fixed substrate were considerably dependent on both the film thickness and the location on the substrate surface, extending from the area nearest the arc plasma source to that at the opposite end of the substrate in a direction parallel to the arc plasma flow; with GZO thin films deposited with various thicknesses in the range from 20 to 200 nm, the films exhibited a thickness dependence of resistivity that was considerably affected by the location on the substrate surface. The variation of resistivity relative to the location on the substrate surface was related to that of carrier concentration, which is mainly attributed to the distribution of the amount of oxygen reaching the substrate surface. In GZO thin films deposited with a thickness of 30–40 nm at a substrate temperature of 250 °C, a resistivity as low as 4 × 10 − 4 Ω cm was obtained in the area of the substrate nearest the arc plasma source.