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Abstract
The effect of slot antenna structures on plasma production wasinvestigated in the large-area planar surface wave plasmas (SWPs) excited with2.45 GHz microwave energy. Plasma production characteristics were measured forvarious types of slot antennae (inclined, transverse, longitudinal anddiverging slots) in Ar discharges. In all the slot antennae, we clearlyobserved the density jumps when the incident power and pressure were varied.These density jumps correspond to the mode jumps between transverse magnetic(TM) eigenmodes in the SWP. In spite of different slot antenna structures, thesame optical emission patterns of the TM62 mode were observed atthe almost same electron density, except for the diverging slots, in which theTM92 mode was selectively excited under the same operatingconditions, where the incident power was 0.8-1.2 kW at a pressure of100-280 mTorr. At lower pressures, say 10 mTorr, the plasmas entirelybroadened over the chamber cross section for all the slot antennae. Among thefour slot antennae, the transverse slot antenna was more efficient for plasmaproduction under the same incident microwave power at a fixed pressure.
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