Abstract
CrNx/Ag nanocomposite films with varying Ag content were prepared by reactive magnetron sputtering under a constant Ar/N2 stream. The films were annealed between 500 – 800 °C in the air. The microstructure and elemental composition of films were studied by X-ray diffraction, scanning electron microscopy and energy dispersive spectroscopy. The mechanical properties were characterized with respect to nano-hardness and high-temperature tribology. The results reveal that the incorporation and concentration of Ag influence the morphology and microstructure of films. The microstructure of films evolves by annealing, and the films with higher Ag concentration exhibit more severe structure evolution. Annealing at 650 °C results in the sublimation of Ag, and the oxide emerges on the film surface. Annealing at 800 °C reveals that the film with 6.2 at.% Ag exhibits superior structural stability, while the one with 20.2 at.% Ag deteriorates. The hardness of films decreases with the increasing Ag concentration and heating temperature. Films with 12.6 at.% Ag and above possess solid lubrication during the sliding at 350–650 °C. Both the friction coefficient and wear resistance are found dependent on the Ag concentration and sliding temperature.
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