Effect of si—h and n—h bonds on electrical properties of plasma deposited silicon nitride and oxynitride films

Abstract

Strong correlations were observed between the improvement in the metal-insulator-semiconductor (MIS) (aluminum-nitride-semiconductor) electrical properties of plasma deposited silicon nitride and oxynitride films and their (Si—H/N—H) bonding ratios in the film bulk. Total hydrogen concentration and spin density of all deposited films decreased with post-deposition annealing. Films with more Si—H bonds and stable (Si—H/ N—H) ratios generally have lowerV fb shift, less positive trap charge and higher breakdown dielectric strength. Silicon oxynitride films with refractive indices of 1.75-1.80, as-deposited and after annealing in forming gas (10% H2 + 90% N2) at various temperatures, were found to have stable (Si—H/N—H) bonding ratios, lower silicon dangling bond density, and better MIS electrical properties compared to other plasma deposited nitride and oxynitride films.