Abstract
In the present work, the nitriding process has been performed in microwave (2450 MHz) post-discharges. The operating conditions for the ArN 2 and ArN 2H 2 post-discharges were a gas pressure in the range 3–100 hPa, a transferred h.f. power of 70–80 W and a flow rate of between 300 and 2000 N cm 3 min −1, giving a high gas velocity. The steel substrates were externally heated to reach the nitriding temperature. Quantitative results on atomic nitrogen concentration downstream from the microwave discharge have been obtained by NO chemiluminescence. This concentration has been studied as a function of the main process parameters. Correlation has been found between the atomic nitrogen concentration and the chemical composition and depth of the iron nitride layers growing on steel surfaces which are located in the post-discharge.
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