Abstract
Mesoporous TiO 2 films were prepared by using titanium tetraisopropoxide as the titania precursor and triblock copolymer as the structure directing agent. The synthesized mesoporous TiO 2 film was confirmed to have the ordered pore structure with rutile phase by small angle and wide angle X-ray diffraction analyses. The mesoporous TiO 2 film has the porosity range from 21.6 to 35.6%, and its Seebeck coefficient was changed according to its porosity, up to −88.6 μV/K. From the obtained Seebeck coefficient, the ordered mesoporous TiO 2 film was found to be a good candidate of thermal sensing layer of thin film thermal sensor.
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