Abstract
We explore the effect that an image-formation system’s point-spread function (PSF) has on measurement of the orientation and position of step edges. The theory of locales is used for numerical computation of bounds on precision as a function of PSF size and shape. It is shown that in the noise-free case the PSF should be 0.5–0.9 pixel in radius for optimal precision to be achieved. PSF shape is shown to have a much lesser effect on precision. A one-dimensional noisy-edge model is analyzed, and results similar to the no-noise case are obtained.
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Published version (
Free)
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
