Abstract
Uniformity of airflow distribution in a unidirectional flow cleanroom has been studied experimentally and numerically. The influence of the height of the plenum chamber and the velocity of airflow introduced into the chamber on the airflow uniformity are investigated experimentally. In addition, a numerical simulation method to predict airflow uniformity is proposed, taking into account the characteristics of the pressure loss of the filter. The calculation domain in this study includes not only the cleanroom but also the plenum chamber and the exhaust chamber. The validity of the numerical method is also verified by comparing the simulation results with the experiments. Finally, the numerical method is used to obtain an appropriate height for the plenum chamber.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
