Abstract

The specific heat cр of plastically deformed silicon single crystals is measured in the temperature range of 100‒800 K. An increase in the cр of silicon single crystals subjected to plastic deformation as compared with the non-deformed sample is detected in the temperature range of T > 200 K. Based on the generally accepted pattern of plastic deformation of crystals, it can be assumed that the increase in the specific heat is probably due to the increase in the imperfection of the crystal structure in the process of its deformation.

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