Abstract
TiO 2 nanoparticle films were prepared by plasma-enhanced chemical vapor deposition, and subsequently, their surfaces were treated by TiCl 4 and O 2 plasmas, respectively. Experiments of phenol photodegradation show that the TiO 2 film treated by O 2 plasma presents much higher photocatalytic activity than that treated by TiCl 4 plasma. X-ray photoelectron spectral analyses indicate that more active species, such as O 2 −, are formed on surface of the film treated by O 2 plasma than that treated by TiCl 4 plasma. The energy levels of the surface species and the photogenerated electronic transitions via these surface species are further investigated by surface photovoltage spectra (SPS) and electric field-induced surface photovoltage spectra (EFISPS).
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