Abstract
Simultaneous laser irradiation during thermal annealing is effective to lower the crystallization temperature of the perovskite structure. However, the surface of a Sr/sub 2/Bi/sub 2/Ta/sub 2/O/sub 9/ (SBT) film with the perovskite structure obtained by laser irradiation is not as smooth as one obtained by thermal annealing. In order to fabricate SBT films that can be used for ferroelectric memories, we need to reduce the surface damage. In the present research, the effect of photon irradiation on the surface damage of SBT is investigated.
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