Abstract
The goal of the present paper is to investigate the phase stability and soft magnetic properties of amorphous CoNbZr films when Pd is added. The CoNbZrPd films deposited on Si wafers exhibited amorphous structures independent of the amount of Pd. On the addition of 4.34% Pd, excellent soft magnetic characteristics of the films were observed with a coercive force of 0.54 Oe and an anisotropy field of 11 Oe, whereas a coercive force of 1 Oe and an anisotropy field of 3.5 Oe were shown in the film without the addition of Pd. The increased anisotropy field and low coercive force of the films may be attributed to the occupancy of Pd in preferred sites parallel to an external magnetic field applied during the deposition process. A permeability of about 1100 was constant at operation frequencies ranging up to 100 MHz, which can be explained by the Landau–Lifshitz formula.
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