Abstract
ABSTRACTPZT (PbxZr0.4Ti0.6O3) thin films were prepared by reactive co-sputtering and annealed by RTA (Rapid Thermal Annealing). Transformation kinetics and effect of Pb content on the transformation were intensively studied using EMA (Effective Medium Approximation). It has been found that depending on Pb content as well as RTA temperature, the crystal structure of PZT films changed greatly. It turned out that the transformation temperature for the perovskite phase can be lowered and the width of transition temperature region was reduced by increasing Pb content in the films. Dependence of transformation path on the Pb content has been studied.
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