Abstract
Delivery systems are often used to supply the slurry used to planarize wafers during semiconductor chip manufacturing. These systems pressurize the slurry to deliver it to the tools and circulate it to help keep the particles in suspension. Pressurization and circulation are accomplished by various means including a variety of pumps and pressure-vacuum technology. Typically, slurry passes through a distribution system approximately 100 times before it is used to polish wafers[1].
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