Abstract
Robotic polishing can greatly improve the manufacturing efficiency of precision optics, and its tool influence function (TIF) needs to be modeled precisely for deterministic fabrication. When polishing large optics, the TIFs are significantly affected by the wear of the polishing pad, which in turn will change the material removal rate. In this paper, the generating mechanism of the pad wear is analyzed, so as to quantitatively predict the wear amount of the polishing pad under different processing parameters; consequently, the TIF error caused by pad wear can be compensated. The experimental results demonstrate that the proposed model can reliably predict the polishing pad shape and the corresponding TIF after different wearing time; henceforth, the resulting form quality and convergence rate of robotic polishing can be significantly improved.
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