Abstract
Titanium dioxide (TiO2) thin films were deposited on p-Si (100) and Corning glass substrates held at room temperature by DC magnetron sputtering at different oxygen partial pressures in the range9×10−3–9×10−2 Pa. The influence of oxygen partial pressure on the structural, electrical, and optical properties of the deposited films was systematically studied. XPS studies confirmed that the film formed at an oxygen partial pressure of6×10−2 Pa was nearly stoichiometric. TiO2films formed at all oxygen partial pressures were X-ray amorphous. The optical transmittance gradually increased and the absorption edge shifted towards shorter wavelengths with the increase of oxygen partial pressure. Thin film capacitors with configuration of Al/TiO2/p-Si have been fabricated. The results showed that the leakage current density of films formed decreased with the increase of oxygen partial pressure to6×10−2Pa owing to the decrease in the oxygen defects in the films thereafter it was increased. The current transport mechanism in the TiO2thin films is shown to be Schottky effect and Fowler-Nordheim tunnelling currents.
Highlights
BOE UIF SBOHF$PSOJOH HMBTT TVCTUSBUFT IFME BU SPPN UFNQFSBUVSF CZ %$ ѣoѣ 1B ćF JOĘVFODF PG PYZHFO QBSUJBM QSFTTVSF.
PO UIF TUSVDUVSBM FMFDUSJDBM BOE PQUJDBM QSPQFSUJFT PG UIF EFQPTJUFE ĕMNT XBT TZTUFNBUJDBMMZ TUVEJFE 914 TUVEJFT DPOĕSNFE UIBU UIF ĕMN GPSNFE BU BO PYZHFO QBSUJBM QSFTTVSF PG ѣ 1B XBT OFBSMZ TUPJDIJPNFUSJD 5J0 ĕMNT GPSNFE BU BMM PYZHFO QBSUJBM QSFTTVSFT XFSF 9SBZ BNPSQIPVT ćF PQUJDBM USBOTNJUUBODF HSBEVBMMZ JODSFBTFE BOE UIF BCTPSQUJPO FEHF TIJęFE UPXBSET TIPSUFS XBWFMFOHUIT TXIJPUIXUFIEFUJIOBDUSFUIBTFFMFPBGLPBYHZFHFDOVSQSBFSOUUJBEMFQOSTFJTUTZVPSGFĕćMNJTOGĕPMSNNDFBEQEBFDDJUSPFSBTTFXEJUXIJDUPIOUĕIHFVJOSBDUSJFPBOTFPGP"G PMY5ZJ0HFOQQB4SJUIJBBMWQFSCFFTFTVOSGFBCUPSJDBUFEѣć 1FB
SFTVMUT PXJOHUP UIF EFDSFBTF JO UIF PYZHFO EFGFDUT JO UIF ĕMNT UIFSFBęFS JU XBT JODSFBTFE ćF DVSSFOU USBOTQPSU NFDIBOJTN JO UIF 5J0 UIJO ĕMNT JT TIPXO UP CF 4DIPUULZ FČFDU BOE 'PXMFS/PSEIFJN UVOOFMMJOH DVSSFOUT.
Summary
$PSOJOH HMBTT TVCTUSBUFT IFME BU SPPN UFNQFSBUVSF CZ %$ ѣoѣ 1B ćF JOĘVFODF PG PYZHFO QBSUJBM QSFTTVSF. PO UIF TUSVDUVSBM FMFDUSJDBM BOE PQUJDBM QSPQFSUJFT PG UIF EFQPTJUFE ĕMNT XBT TZTUFNBUJDBMMZ TUVEJFE 914 TUVEJFT DPOĕSNFE UIBU UIF ĕMN GPSNFE BU BO PYZHFO QBSUJBM QSFTTVSF PG ѣ 1B XBT OFBSMZ TUPJDIJPNFUSJD 5J0 ĕMNT GPSNFE BU BMM PYZHFO QBSUJBM QSFTTVSFT XFSF 9SBZ BNPSQIPVT ćF PQUJDBM USBOTNJUUBODF HSBEVBMMZ JODSFBTFE BOE UIF BCTPSQUJPO FEHF TIJęFE UPXBSET TIPSUFS XBWFMFOHUIT TXIJPUIXUFIEFUJIOBDUSFUIBTFFMFPBGLPBYHZFHFDOVSQSBFSOUUJBEMFQOSTFJTUTZVPSGFĕćMNJTOGĕPMSNNDFBEQEBFDDJUSPFSBTTFXEJUXIJDUPIOUĕIHFVJOSBDUSJFPBOTFPGP"G PMY5ZJ0HFOQQB4SJUIJBBMWQFSCFFTFTVOSGFBCUPSJDBUFEѣć 1FB
Sign-in/Register to view highlights & summary Sign-in/Register to access full text options 
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
