Abstract

Conventional hydrodynamic bearing material is wettable in nature, and these materials cause high force of friction in small scale micro-electro-mechanical systems. However, selecting any material with non-wettability behavior provides good scope for reduction of high coefficient of friction in MEMS-based applications. Like non-wettability, the micro-scale random or regular surface texturing is also one of the methods to increase the load carrying capacity in MEMS. Therefore, in the present work, the effect of optimize slippage and surface texture zone on one of the mechanical components (hydrodynamic journal bearing) of MEMS device is investigated. The finite difference method with central differencing scheme is used to discretize the generalized Reynolds equation. It is observed from the results that the optimized slip and texture zone has a positive effect on the load carrying capacity and maximum pressure of hydrodynamic journal bearing.

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