Abstract
'Swing curves' derived from the modelling program SOLID are presented for a typical conventional i-line resist. At a constant sub-half-micron feature size, results illustrate the effect of varying stepper lens conditions on 'swing curve' amplitude and indicate that, whilst initially defined by reflectivities, resist thickness and resist absorption coefficient, it increases as aerial image peak intensity decreases. 'Swing curves' are drawn in terms of exposure-to-size vs resist thickness which has the advantage of always producing complete plots.
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