Abstract

Dielectric properties and lattice parameters of nonstoichiometric strontium titanate were systematically investigated. The X-ray diffraction measurements indicated the formation of SrO·(SrTiO3)n (n=4-53) instead of SrTiO3 with excess Sr. Epitaxial films grown on (111)Pt/(100)MgO by an ArF excimer laser ablation method were mostly orientated along the (102n+1) axis. With decrease in the frequency of Sr-O plane sliding-in (increasing n value), the dielectric constant ε increased from 87ε0 to 300ε0. Furthermore, an improved property was also obtained in its temperature dependence. The sublattice (perovskite SrTiO3) in the vicinity of sliding-in Sr-O plane was slightly distorted (compressed by about 15%).

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