Abstract
In this article, nitrogen (N2) doped diamond-like carbon (N-DLC) coatings are deposited by Atmospheric pressure chemical vapor deposition (APCVD) technique at varying N2 flow rates and are investigated by scanning electron microscopy (SEM), atomic force microscopy (AFM), Raman spectroscopy, nanoindentation (NI) and nano scratch (NS) characterization. The wear rate (WR) and coefficient of friction (μ) of the N-DLC thin films increase from 1.32 × 10−4 to 3.11 × 10−4 μm2 and 0.05 to 0.15 with the increase of load from 40 to 70 mN at 70 sccm N2 flow rate. The results showed that there is a significant improvement in the tribological and mechanical properties of the APCVD synthesized DLC film as compare to the other PVD deposited DLC film.
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