Abstract
In this study, copper samples with 99% purity implanted by N+ and N2 + ions. Implantation of ions performed at 50 keV and various doses ranging from 1 × 1017 to 1 × 1018 ions/cm2. Morphology of samples’ surface studied by atomic force microscopy. Microstructure of modified surfaces after ion implantation obtained using grazing incidence X-ray diffraction technique (GIXRD). Formation of both copper nitride and copper trinities confirmed by GIXRD results. Microhardness properties and corrosion behavior of implanted samples measured by Vickers and corrosion test, respectively. The maximum hardness of copper surface observed after nitrogen ion implantation at the dose of 3 × 1017 ions/cm2. Moreover, the results showed that corrosion resistivity significantly increase.
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