Abstract
Fe, FeN, and FeCoN films were fabricated by direct-current (DC) magnetron sputtering. The dependence of surface morphology, magnetic properties, and resistivity on phase structure was systematically investigated. α″-Fe16N2 (202) phase occurred with the incorporation of nitrogen (N) and cobalt (Co), and the surface morphology evolved from random-leafs-like shapes to triangular-pyramid-like islands. Clear reproducible striped domains appeared at the FeCoN film surfaces, because of high perpendicular anisotropy in the film. The additions of Co enhanced the formation of the α″-Fe16N2 phase, which caused the saturation magnetization (Ms) value of the FeCoN film to increase to 2088 emu/cm3, considerably higher than that of pure Fe. Moreover, the significant amount of α″ phase leads to higher resistivity and therefore improved high-frequency permeability.
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