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Abstract
Nitrogen-doped amorphous hydrogenated hard carbon films were deposited by r.f. glow discharge from methane–nitrogen mixtures onto silicon substrates. The elastic properties of films obtained for different N 2 partial pressures were investigated by Brillouin light scattering, while Raman spectroscopy, X-ray photoelectron spectroscopy and X-ray reflectivity were exploited to study their structural and vibrational properties. Addition of a low percentage of nitrogen in the films induces marked modifications of the microscopic film structure, which induces a clear decrease of the elastic constants.
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