Abstract
Heating of neutral gas in inductively coupled plasma (ICP) is known to result in neutral gas depletion. In this work, this effect is considered in the simulation of the magnetic field distribution of a 13.56 MHz planar coil ICP. Measured electron temperatures and densities at argon pressures of 0.03, 0.07 and 0.2 mbar were used in the simulation whilst neutral gas temperatures were heuristically fitted. The simulated results showed reasonable agreement with the measured magnetic field profile.
Highlights
Significant heating of neutrals has been observed in low temperature high density plasmas such as inductively coupled plasmas.[1,2,3]
Uniform neutral temperature at room and elevated temperature are considered, and best fit is observed for the spatially resolved Gaussian profile consideration when compared to measured fields
Due to fixed positions of diagnostic ports of the reactor, ne and Te were measured at only three axial locations, z = (18.6±0.3), (15.8±0.3) and (10.4±0.3) cm, whilst the radial measurements were from r = 0 to 12.0 cm at incremental steps of 1.0 cm. These values were fitted into 2D Gaussian based distributions for 0.03, 0.07 and 0.2 mbar argon pressure as shown in Fig. 2, and these fitted distributions are used in the simulation of the magnetic fields
Summary
Significant heating of neutrals has been observed in low temperature high density plasmas such as inductively coupled plasmas.[1,2,3] This is one of the mechanisms that causes neutral depletion to occur, resulting in non-uniformity of the plasma and compromising the uniformity of density profiles and transport of reactive free radicals necessary in large area plasma processing. Numerous measurements and simulation on the electromagnetic fields in planar. This is an Open Access article published by World Scientific Publishing Company. We have taken into account heuristically fitted Gaussian profile of the spatial distribution of neutral gas temperature in the simulation of radial profile of the axial and radial H-mode magnetic fields in a planar coil ICP driven at 13.56 MHz in argon pressures of 0.03, 0.07 and 0.2 mbar. Uniform neutral temperature at room and elevated temperature are considered, and best fit is observed for the spatially resolved Gaussian profile consideration when compared to measured fields
Sign-in/Register to view highlights & summary Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: International Journal of Modern Physics: Conference Series
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
