Effect of nanopowder preparation method on the sintering behavior and microstructure of Mo[sbnd]W alloy

Abstract

Molybdenum‑tungsten (MoW) alloy sputtering targets are widely used in electronic, displays, and solar cells due to their favorable thermal and electrical conductivities, low thermal expansion coefficient, and corrosion resistance. Herein, we examined the impact of two different MoW nanopowders preparation methods, i.e., mixed oxide-reduction and mechanical alloying, on the sintering behavior and microstructure of sintered compacts. The sintered compacts produced with oxide-reduced nanopowders exhibited higher density and purity, and a finer microstructure, making them more suitable for sputtering targets compared with those made with mechanically alloyed nanopowders. This study provides valuable insights into the effect of powder fabrication processes on the consolidation of MoW sintered compacts, which is crucial for the development of high-quality sputtering targets.