Abstract
The effect of the composition of a mixture on the electrophysical parameters and emission spectra of HCl-O2 and HCl-Ar plasma was analyzed. Data on the gas temperature and reduced electric-field intensity are obtained. Based on an analysis of the emission spectra of plasma, the dilution of HCl with argon and oxygen is shown to result in the disproportionation of concentrations of Cl and H atoms due to the occurrence of secondary atomic and molecular processes.
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