Abstract
The present work shows the SO2 gas sensing property of SnO2 thin film based sensor prepared by using RF sputtering technique. Different catalysts (MgO and V2O5) in form of nanoclusters having diameter of 600 μm have been loaded on SnO2 surface to detect SO2 gas. The sensing response of all these films towards SO2 is monitored. Microstructural studies have been carried out using XRD and UV-Visible Spectrophotometer and a good correlation has been found between the microstructural and gas sensing properties of these deposited samples. Both catalysts when incorporated with SnO2 film show high selectivity towards SO2 gas at lower operating temperature. MgO gives a sensitivity of 317% at an operating temperature of 280°C towards 500 ppm of SO2 gas whereas V2O5 catalyst gives a sensitivity of 166% at 280°C for the same amount of gas.
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