Abstract
Optical properties of metal (Al, Ag, Sb, and Sn)-ion-implanted ZnO films have been studied by ultraviolet-visible spectroscopy and spectroscopic ellipsometric techniques. The effects of metal-ion doping on the optical band gap (Eg), refractive index (n), and extinction coefficient (k) of nanocrystalline ZnO films have been studied for the similar implantation dose of all the metal ions. The ellipsometric spectra of the ion-implanted samples could be well described by considering an air/roughness/ZnO–M (layer 1)/ZnO (layer 2)/glass model. The band gap of ZnO films increases with Al ion doping and decreases with doping of Ag, Sb, and Sn ions. The refractive index of ZnO films in the visible spectral region increases substantially on Sb and Sn ion doping, while it decreases to some extent with Al ion doping.
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