Year-end Sale % OFF 
Abstract
The effect of top metal electrodes on the electrical characteristics of Al2O3 metal-insulator-metal capacitors is studied. The leakage current and breakdown characteristics were observed to have a strong dependence on the electrode material. Devices with Al electrodes exhibited significantly higher breakdown voltages compared to devices with Au, Ni, Cu, and Ag electrodes. Introducing an Al diffusion barrier dramatically increased the breakdown field and reduced the leakage current for capacitors with Ag, Au, and Cu electrodes. The electrical characteristics were found to relate well to material properties of the contacting metals, such as ionization potential and diffusion coefficient.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
