Abstract

Compared with the traditional mechanical beam deflector in a beam-scanning system, the dual-wedge scanning system has several advantages, for example, compact structure, fast scanning speed, and low power consumption. High accuracy is the most important factor in dual-wedge scanning, but mechanical errors caused by machining or assembly errors adversely affect this scanning accuracy. Horizontal and angular mechanical errors appear between the incident light and the dual-wedge central optical axes. By building a mathematical model of an ideal dual-wedge scanning trajectory and a trajectory affected by mechanical errors, this paper analyzes the types and degree of influence on the scanning process, as well as the sensitivity of scanned images to different errors. Results show that the angular error has the most significant influence on the scanning image accuracy, in terms of trajectory shape and coverage. To correct the angular error, the two degrees-of-freedom flexible fine-tuning mechanism is customized based on the principle of the cantilever beam type. After finite element analysis and experimental validations, the fine-tuning mechanism can guarantee that the angular error in the dual-wedge central optical axes will be lower than 0.05deg, thus ensuring scanning trajectory accuracy.

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